What happen if it become possible to see the effect of various operations during device processing like the effect of diffusion, etching, etc. and also analyze its behavior. Thanks to SILVACO TCAD Tool due to which its become possible. Actually SILVACO is the name of a Organization which provides us Semiconductor process and Device simulation solutions.These solutions are the results of various numerical calculation based on standard models like Exponential and double Gaussian built/in Density of States distribution models, Poole/Frenkel electric field dependent mobility model, Steady/state and transient recombination models, Bimolecular Langevin Recombination Model etc. Following are the basic tools of SILVACO TCAD Software.
1) Athena : a Process Simulator used for simulating ion implantation, diffusion, etching, deposition, lithography, oxidation, and silicidation of semiconductor materials. It replaces costly wafer experiments with simulations.
2) ATLAS : a Device Simulator used to simulate electrical, optical, and thermal behavior of semiconductor devices. It provides a physics-based, modular, and extensible platform to analyze DC, AC, and time domain responses for all semiconductor based technologies in 2 and 3 dimensions.
1) Athena : a Process Simulator used for simulating ion implantation, diffusion, etching, deposition, lithography, oxidation, and silicidation of semiconductor materials. It replaces costly wafer experiments with simulations.
2) ATLAS : a Device Simulator used to simulate electrical, optical, and thermal behavior of semiconductor devices. It provides a physics-based, modular, and extensible platform to analyze DC, AC, and time domain responses for all semiconductor based technologies in 2 and 3 dimensions.
3) Tonyplot: is a graphical post processing tool for use with all SILVACO simulators. It allows us to display any data file produced by SILVACO tools, it also provides extensive “tools” for examining plots and the associated data.
4) Dev Edit: is a device structure editor. It can be used to generate a new mesh that mean nodes at which calculation take place on an existing structure and can be used to create or modify a device. Following Figure shows a MOS Structure designed on Dev Edit.
5) Dec Build: is an interactive, graphic runtime environment for developing process and device simulation input decks. It consists of a window for input deck creation and editing, a window for simulator output and control, and a set of popups for each simulator that provide full language and run-time support.
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